Research topic: Uncooled thermal IR and THz sensor systems

picture: thermal sensor principle
thermal sensor principle

This topic comprises the concept and development of uncooled sensors and sensor systems operating in the spectral region from NIR to FIR with wavelengths between 2 µm and 1 mm including the THz frequency range. The sensors are based on the thermal transduction principle within a working temperature interval from room temperature to about 250 °C. As to the signal generation, the established thermoelectric principle is complemented by the thermoresistive principle that will be alternatively employed in particular for the radiation detection in the THz range.

picture: multigas sensor chips
multigas sensor chips

The development of next generation thermal micro sensors includes a simultaneous improvement of the relevant sensor parameters responsivity, detectivity and dynamic response behaviour taking into account the system integration aspects of new sensor concepts. The improvements can be realized by conceptual und technical innovations aiming at the 3 critical issues for performance enhancement of thermal sensors, i.e., signal input (1), conversion to a temperature gradient (2) and transduction to an electric signal (3).

picture: true rms thermal converter chip
true rms thermal converter chip

As to (1), new nano-technologically based broadband absorbers, notably also in the THz range, are in the focus of interest. Regarding (2), improvements in the thermal isolation structure effectiveness of the sensors are crucial, e.g., by using floating membranes, alternative substrate and isolation layer materials, reduced structure widths and vacuum encapsulation. Concerning (3) progress in high-performance thermoelectric and thermoresistive functional materials will be beneficial.

Cooperation with DLR (Berlin) in developing a linear thermopile double array for a spectrometer aboard a Mercury mission (MERTIS) and another one with EADS-ASTRIUM-CRISA (Madrid) in developing an IR sensor for a Mars mission (REMS) are parts of our ambition to demonstrate the excellence of the IPHT thermal micro sensors by collaborating in space projects where highest performance and reliability standards have to be met under extreme ambient conditions.

In the field of precision measurement techniques the planar true r.m.s. multijunction thermal converter developed in cooperation with PTB (Braunschweig) is a currently unique device acknowledged and sold worldwide. Its further advancement is strived for by optimization in the HF range and reduction of the ac-dc transfer difference.

picture: thermopile array pixel
thermopile array pixel

A great potential for development is given by the extension of the thermal sensor concept into the THz range. THz technology is seminal in numerous applications, e.g., biomedical/biochemical analysis (THz spectroscopy), quality control and security checks (THz imaging). Therefore, within our research topic, the development of high-detectivity thermal micro sensors and arrays for the THz range will be a long term goal. Aimed at designing a room temperature real time THz camera for security applications the start of the TERACAM project has enabled IPHT to join this promising field. Within this project, IPHT is responsible for the development of an antenna-coupled 2D on-chip 32×32 pixel THz imaging array.

IPHT Jena

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Kontakt

Dr. Ernst Keßler
Fon: +49 (0)3641/206-315
Fax: +49 (0)3641/206-399
ernst.kessler@ipht-jena.de