Several calibration standards for use in the nanoscale were developed.

These standards are commercially available at the Supracon AG and can be made traceable by means of the German national metrology institute Physikalisch-Technische Bundesanstalt (PTB).

 

The Nanoscale AFM-CD Standard (CD, critical dimension) contains patterns on the nanometer scale for the linewidth and also the pitch calibration of scanning probe microscopy methods (atomic force microscopy (AFM)).

The Nanoscale Linewidth/Pitch Standard contains patterns on the nanometer scale for the linewidth calibration and resolution-check of high-resolution optical microscopy techniques like deep ultraviolet microscopy (DUVM) and confocal laser scanning microscopy (CLSM).

The AFM-tip characterizer contains patterns for an in-situ determination of the AFM-tip shape.