The Foundry of the European FLUXONICS Network

FLUXONICS Foundry is operating an 1 kA/cm2 RSFQ process

Micrograph of a shunted Josephson Junction

Superconducting
metal layers

- Groundplane (M0)
- Two wirings (M1, M2)

Josephson Junction

- Trilayer (T1), JC = 1 kA/cm2

 Isolation

- Anodizised Nb (I0A, I1A)
- SiO2 (I0B,IOC,I1B, I2)

Normal metal
layers

- Mo as shunt, RSQ = 1Ώ, (R1)
- Au as bonding pad (R2)

 

FLUXONICS Foundry Cell Library Base for Advanced Circuits

RSFQ Cell library:

  • Basic gates for interfacing, transmission and processing
  • Support for easy access to superconducting electronics
  • All cells are robust and experimental tested
Demonstration of design and fabrication process: 4 bit shift register
 

ANSPRECHPARTNER

  • Dr.​ Jürgen​ Kunert
    +49 (0) 3641 · 206-127 / -112
    E-Mail
  • pics
    Prof. Dr.​ Hans-Georg​ Meyer
    +49 (0) 3641 · 206-116
    E-Mail

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