The department Microfluidics offers expertise and technical services to the in-house working groups and external customers.

The IPHT has a clean room facility, which we share with the Institute of Applied Physics of the Friedrich Schiller University. From first designs to the finished modules all processes can be performed in house. The available technologies – partially in close co-operation with the department of quantum detection – are:

• mask generation (pattern generator, e-beam lithography)
• e-beam lithography (access to a Leica SB350 OS/IOF at
  Fraunhofer IOF)
• photo lithography (EVG 620 and AL6-2 mask aligner, GCA Series 8500 wafer stepper)
• thin film deposition (thermal evaporation, sputtering, PECVD)
• dry etching (RIE, IBE, ECR)
• wet etching (especially Si deep etching and patterning of glass and metallic thin films)
• inspection (LM, REM, AFM, profilometer)
• assembly and interconnection techniques (slicing, bonding, packaging, electrical and fluidic interconnections)
  
  

We are glad to offer services like individual processing steps up to the complete development and fabrication of MEMS modules in the form of direct orders or as partner in a publicly funded project.