Lasers

• excimer lasers
  - F₂        157 nm
  - ArF      193 nm
  - KrF      248 nm
  - XeF      351 nm
• Nd:YAG lasers
  - fundamental to fourth harmonic (266 nm)
• pulsed dye lasers
  - with frequency doubling
• fs/ps laser (titanium sapphire)
  - tuneable between 700 and 900 nm + SHG, THG
• argon ion laser
• krypton ion laser
• diode laser
• CO₂ laser
• quantum cascade laser 

Optical diagnostics

• VUV spectrometer
• UV-VIS spectrometer
• laser spectrometer of high resolution (pm)
• wavemeter, scanning etalon
• optical multi-channel analyzer (OMA) systems
• intensified CCD-cameras with high frame rates
• laser induced deflection measurement set-ups (LID)
• transmission measurement set-ups 

Further equipment

• quadrupole and time-of-flight mass spectrometers
• high-pressure and high-temperature gas measurement cells
• optical cryostats
• set-ups for laser microscopy
• set-up for fs laser material processing

Deutsch | English